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as the technology has attracted a lot of attention the capacitive sensors based on the cantilever of the microelectromechanical system (MEMS) are promising devices with good performance. They are also able to observe the temporal effects of the environment and calibrate the values to provide information about the physical parameters by studying the deviation of the cantilevered structure. In this work, a capacitive sensor based on MEMS is designed, which while bending provides a movement of the cantilever when subjected to applied pressure by means of external factors. To estimate the cantilever performance and obtain a specific application design of the parameters, simulations of finite element analysis were carried out using COMSOL Multiphysics.
"design and simulation of mems based sensor for contineous glucose monitoring", International Journal of Science & Engineering Development Research (www.ijrti.org), ISSN:2455-2631, Vol.3, Issue 5, page no.66 - 69, May-2018, Available :http://www.ijrti.org/papers/IJRTI1805013.pdf
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2456-3315 | IMPACT FACTOR: 8.14 Calculated By Google Scholar| ESTD YEAR: 2016
An International Scholarly Open Access Journal, Peer-Reviewed, Refereed Journal Impact Factor 8.14 Calculate by Google Scholar and Semantic Scholar | AI-Powered Research Tool, Multidisciplinary, Monthly, Multilanguage Journal Indexing in All Major Database & Metadata, Citation Generator